https://scholars.lib.ntu.edu.tw/handle/123456789/372734
標題: | A fully integrated humidity sensor system-on-chip fabricated by micro-stamping technology | 作者: | Huang, C.-W. Huang, Y.-J. SHEY-SHI LU CHIH-TING LIN |
關鍵字: | Humidity sensor chip; Micro-stamping process; Polyaniline; Sensor system-on-chip | 公開日期: | 2012 | 卷: | 12 | 期: | 9 | 起(迄)頁: | 11592-11600 | 來源出版物: | Sensors | 摘要: | A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications. © 2012 by the authors; licensee MDPI, Basel, Switzerland. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84866977072&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/372734 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84866977072&doi=10.3390%2fs120911592&partnerID=40&md5=ac1e3bdd656da2016c68c63c4ea5eb1e |
ISSN: | 14248220 | DOI: | 10.3390/s120911592 | SDG/關鍵字: | Digital controllers; Fabricated sensors; Humidity Sensor Chips; Interface circuits; Low-power consumption; Micro-stamping process; System on chips; Wireless transceiver; Application specific integrated circuits; Fabrication; Polyaniline; Programmable logic controllers; Stamping; Humidity sensors |
顯示於: | 電機工程學系 |
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