https://scholars.lib.ntu.edu.tw/handle/123456789/377698
標題: | Precision tracking of a piezo-driven stage by charge feedback control | 作者: | Chen, L.-S. Chen, J.J.H. Kuo, F.-C. Chen, M.-S. Chung, B.-I. YUNG-YAW CHEN JIA-YUSH YEN |
關鍵字: | Piezo actuator Charge control Precision servomechanism | 公開日期: | 2013 | 卷: | 37 | 期: | 4 | 起(迄)頁: | 793-804 | 來源出版物: | Precision Engineering | 摘要: | This paper presents a novel approach for precisely controlling the motion of a piezo actuator embedded in a mechanical stage without using a displacement sensor. A piezo actuator has a high displacement resolution, but the positioning performance is degraded by hysteresis between the applied voltage and resultant displacement. However, an electromechanical model of a piezo actuator suggests that the charge flowing in the actuator is directly related to the dynamic response of the piezo displacement. Therefore, this study directly measured the charge stored in a piezo actuator, and achieved dynamic reference tracking of the actuator's displacement by regulating the charge flowing through the actuator to follow a predefined trajectory. This novel approach requires neither specially designed charge amplifier circuits nor implementation of an inverse hysteresis model. The complete model identification and the digital controller design procedure for a piezo-driven mechanical stage are presented. The charge feedback controller is designed according to the dynamic characteristics of both the actuator and the stage, so that instability is minimized relative to using a charge amplifier. The experimental results confirm satisfactory tracking performance, and reveal the influence of model uncertainties on the system performance. © 2013 Elsevier Inc. All rights reserved. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84881155549&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/377698 |
ISSN: | 01416359 | DOI: | 10.1016/j.precisioneng.2013.03.002 | SDG/關鍵字: | Charge control; Digital controller designs; Displacement resolution; Dynamic characteristics; Electromechanical models; Inverse hysteresis model; Positioning performance; Resultant displacement; Dynamic response; Feedback control; Hysteresis; Uncertainty analysis; Actuators |
顯示於: | 機械工程學系 |
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