Nitric acid compensated aluminum oxide dielectrics with improved negative bias reliability and positive bias temperature response

Journal

Journal of Applied Physics

Journal Volume

113

Journal Issue

5

Date Issued

2013

Author(s)

Lin, C.-C.

Hwu, J.-G.

DOI

10.1063/1.4790371

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84873656915&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/378071

SDGs

[SDGs]SDG7

Type

journal article