Improvement of electrical performance of HfO2/SiO 2/4H-SiC structure with thin SiO2

Journal

ECS Journal of Solid State Science and Technology

Journal Volume

2

Journal Issue

8

Date Issued

2013

Author(s)

Hsu, C.-M.

Hwu, J.-G.

DOI

10.1149/2.016308jss

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84887373875&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/378074

Type

journal article