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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Effect of H2O on the electrical characteristics of ultra-thin SiO2 prepared with and without vacuum treatments after anodization
Details
Effect of H2O on the electrical characteristics of ultra-thin SiO2 prepared with and without vacuum treatments after anodization
Journal
Microelectronic Engineering
Journal Volume
104
Pages
5-10
Date Issued
2013
Author(s)
Chen, T.-Y.
Lu, H.-W.
Hwu, J.-G.
JENN-GWO HWU
DOI
10.1016/j.mee.2012.11.005
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84870787548&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/378075
Type
journal article
