https://scholars.lib.ntu.edu.tw/handle/123456789/379966
標題: | Fabrication of large-scaled synergetic silicon nanowire arrays using metal-assisted chemical etching for solar cell applications | 作者: | Liu, C.-T. Hsueh, C.-C. Thiyagu, S. Lin, T.-C. CHING-FUH LIN |
關鍵字: | Light Trapping Effect; MacEtch; SiNW | 公開日期: | 2013 | 起(迄)頁: | 1030-1033 | 來源出版物: | IEEE Conference on Nanotechnology | 摘要: | We fabricate Silicon nanowire (SiNW) arrays for solar-cell applications on 6-inch wafers employing metal-assisted chemical etching (MacEtch). It can reduce cost and energy consumption. However it is difficult to make uniform SiNW arrays on large size wafer. Here we demonstrate a simple method to achieve a uniform SiNW on 6 inch wafers. Moreover, optical properties and surface morphologies of 6 inch N-type pyramid/SiNW arrays and 6 inch P-type as-cut/SiNW arrays are investigated. Reflectance indicates the extensive light-trapping effect by the SiNW arrays. Thus, the improved MacEtch method is promising for future commercial mass production on large size wafers. © 2013 IEEE. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84894117179&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/379966 |
DOI: | 10.1109/NANO.2013.6720948 |
顯示於: | 電機工程學系 |
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