https://scholars.lib.ntu.edu.tw/handle/123456789/385717
標題: | Investigation of PZT/Si wafer micro milling using diamond coated tool | 作者: | YAO-YANG TSAI | 公開日期: | 2014 | 卷: | 1 | 來源出版物: | ASME 2014 International Manufacturing Science and Engineering Conference, Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84908868626&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/385717 |
DOI: | 10.1115/MSEC2014-4087 |
顯示於: | 機械工程學系 |
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