https://scholars.lib.ntu.edu.tw/handle/123456789/387375
Title: | Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication | Authors: | Kao, Y.-T. Chang, S.-C. Chang, C.-M. SHI-CHUNG CHANG |
Issue Date: | 2014 | Journal Volume: | 2014-January | Start page/Pages: | 774-779 | Source: | IEEE International Conference on Automation Science and Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84939637633&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/387375 |
DOI: | 10.1109/CoASE.2014.6899413 |
Appears in Collections: | 電機工程學系 |
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