https://scholars.lib.ntu.edu.tw/handle/123456789/404492
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Liao, M.-H. | en_US |
dc.contributor.author | Chen, C.-H. | en_US |
dc.contributor.author | Kao, S.-C. | en_US |
dc.contributor.author | Huang, M.-C. | en_US |
dc.creator | Huang, M.-C.;Kao, S.-C.;Chen, C.-H.;Liao, M.-H. | - |
dc.date.accessioned | 2019-03-11T08:01:07Z | - |
dc.date.available | 2019-03-11T08:01:07Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/404492 | - |
dc.relation.ispartof | 2013 e-Manufacturing and Design Collaboration Symposium | - |
dc.title | The chemical vapor deposition chamber design to improve the thin film deposition quality in both 12? (300 mm) and 18? (450 mm) wafers with the development of 3D chamber modeling and experimental visual technique | en_US |
dc.type | conference proceeding | en |
dc.identifier.doi | 10.1109/eMDC.2013.6756036 | - |
dc.identifier.scopus | 2-s2.0-84898021931 | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.openairetype | conference proceeding | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.grantfulltext | none | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
crisitem.author.orcid | 0000-0003-2942-4520 | - |
顯示於: | 電機工程學系 |
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