https://scholars.lib.ntu.edu.tw/handle/123456789/407842
Title: | Age-based double EWMA controller and its application to a CMP process | Authors: | Chen, A. Guo, R.-S. |
Issue Date: | 2000 | Start page/Pages: | 261-276 | Source: | Run-to-Run Control in Semiconductor Manufacturing | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056912945&partnerID=40&md5=7c2c22f2a70718d3cf151f4e8bead742 https://scholars.lib.ntu.edu.tw/handle/123456789/407842 |
Appears in Collections: | 工商管理學系 |
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