https://scholars.lib.ntu.edu.tw/handle/123456789/407842
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, A. | en_US |
dc.contributor.author | Guo, R.-S. | en_US |
dc.creator | Chen, A.;Guo, R.-S. | - |
dc.date.accessioned | 2019-05-13T10:35:48Z | - |
dc.date.available | 2019-05-13T10:35:48Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056912945&partnerID=40&md5=7c2c22f2a70718d3cf151f4e8bead742 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/407842 | - |
dc.relation.ispartof | Run-to-Run Control in Semiconductor Manufacturing | - |
dc.title | Age-based double EWMA controller and its application to a CMP process | en_US |
dc.type | book chapter | en |
dc.identifier.scopus | 2-s2.0-85056912945 | - |
dc.relation.pages | 261-276 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.openairetype | book chapter | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.dept | Business Administration | - |
crisitem.author.dept | Taidah Entreprenuership Center | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Management | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 工商管理學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。