https://scholars.lib.ntu.edu.tw/handle/123456789/409117
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yang Y.-J. | en_US |
dc.contributor.author | Kao P.-K. | en_US |
dc.contributor.author | Hsu C.-C. | en_US |
dc.creator | Kao P.-K.;Yang Y.-J.;Hsu C.-C. | - |
dc.date.accessioned | 2019-05-17T08:41:53Z | - |
dc.date.available | 2019-05-17T08:41:53Z | - |
dc.date.issued | 2015 | - |
dc.identifier.issn | 10577157 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/409117 | - |
dc.description.abstract | This letter presents a low-cost (<0.25 USD per device), easy-to-fabricated, and flexible microplasma generation device (MGD), and the use of this device to perform surface patterning. This dielectric-barrier-discharge-type MGD is made of double-side copper clad laminates and the electrode patterns were fabricated by a printed circuit board fabrication-based method, which allows the patterning without lithographic processes with good feature transfer fidelity. The MGD was utilized to create hydrophilic/hydrophobic contrast by a maskless patterning process, either creating hydrophobic patterns on hydrophilic surfaces or hydrophilic pattern on hydrophobic surfaces with sub-millimeter spatial resolution. In the former case, the hydrophobic fluorocarbon polymer (FCP) patterns were deposited on glass using c-C4F8 and He plasmas. In the latter case, hydrophilic patterns were created on a FCP-coated glass substrate using the MGD operated in ambient air. We also demonstrated that the flexibility of the device enabled non-flat surface patterning. ? 1992-2012 IEEE. | - |
dc.language | English | - |
dc.relation.ispartof | Journal of Microelectromechanical Systems | en_US |
dc.subject | Fluorocarbonmaskless patterningmicroplasmapolymerization | - |
dc.title | A Low-Cost and Flexible Microplasma Generation Device to Create Hydrophobic/Hydrophilic Contrast on Nonflat Surfaces | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1109/JMEMS.2015.2457236 | - |
dc.identifier.scopus | 2-s2.0-84959546540 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84959546540&doi=10.1109%2fJMEMS.2015.2457236&partnerID=40&md5=b2d1267c5d932ac85ed5ad0cb47f9357 | - |
dc.relation.pages | 1678-1680 | - |
dc.relation.journalvolume | 24 | - |
dc.relation.journalissue | 6 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.orcid | 0000-0002-8366-3592 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 化學工程學系 |
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