|Title:||Effects of oxygen addition and treating distance on surface cleaning of ITO glass by a non-equilibrium nitrogen atmospheric-pressure plasma jet||Authors:||Chiang M.-H.
|Keywords:||Atmospheric-pressure plasma jetDBDITOQuasi-pulsedSurface cleaning||Issue Date:||2010||Journal Volume:||30||Journal Issue:||5||Start page/Pages:||553-563||Source:||Plasma Chemistry and Plasma Processing||Abstract:||
Effects of oxygen addition and treating distance on cleaning organic contaminants on stationary and non-stationary (1-9 cm/s) ITO glass surfaces by a parallel-plate nitrogen-based dielectric barrier discharge (DBD) are investigated experimentally; the DBD is driven by a 60 kHz bipolar quasi-pulsed power source. The results show that two regimes of favorable operating condition for improving the hydrophilic property of the surface (reducing the contact angle from 84¢X to 25-30¢X) are found. The measured spatial distribution of NO-£^ UV emission, O 3concentration and OES spectra are shown to strongly correlate with the measured hydrophilic property. At the near jet downstream locations (z < 10 mm), the metastable N 2(A 3£m + u) and photo-induced dissociation of ozone play dominant roles in cleaning the ITO glass surface; while at the far jet downstream locations (z > 10 mm), where the ratio of oxygen to nitrogen is lower, only the long-lived metastable N 2(A 3£m + u) plays a major role in cleaning the ITO glass surface. ?Springer Science+Business Media, LLC 2010.
|Appears in Collections:||化學工程學系|
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