https://scholars.lib.ntu.edu.tw/handle/123456789/409166
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | P. K. Kao | en_US |
dc.contributor.author | C. C. Hsu | en_US |
dc.creator | P. K. Kao;C. C. Hsu | - |
dc.date.accessioned | 2019-05-20T03:10:19Z | - |
dc.date.available | 2019-05-20T03:10:19Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/409166 | - |
dc.description | Poster | - |
dc.title | Fluorocarbon Films Deposited by c-C4F8/N2/Ar Plasmas: The Effect of N2-addition on Gas Phase Kinetics and Surface Chemistry | en_US |
dc.type | Poster | en |
dc.relation.conference | AVS 60th International Symposium, Long Beach, CA, USA, Oct, 2013.AVS | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.openairetype | Poster | - |
item.grantfulltext | none | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.orcid | 0000-0002-8366-3592 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 化學工程學系 |
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