https://scholars.lib.ntu.edu.tw/handle/123456789/410953
標題: | Integration of capacity planning techniques for tool portfolio planning in semiconductor manufacturing | 作者: | Chou Y.-C. Wu C.-S. Kao C.-E. Hsieh S.-H. |
關鍵字: | Capacity Planning; Manufacturing Simulation; Queuing Analysis; Resource Portfolio Planning | 公開日期: | 2001 | 卷: | 8 | 期: | 4 | 起(迄)頁: | 279-288 | 來源出版物: | International Journal of Industrial Engineering : Theory Applications Practice |
摘要: | Because semiconductor wafer manufacturing plants are large manufacturing systems with complex queuing behavior, sophisticated techniques are required for capacity planning. Static capacity modeling, queuing capacity modeling, and simulation are three common methods of capacity analysis, but they have different premises and provide capacity information in different granularity levels. This paper presents a planning procedure that integrates the three methods of capacity analysis for resource portfolio planning in semiconductor manufacturing and novel modeling techniques of each method are described. First, the accuracy of static capacity analysis is improved by predictive estimation of batch machine efficiency. Second, queuing analysis is utilized to generate the solution space of resource portfolios. Third, simulation techniques for the determination of the steady state and the reduction of simulation time are described. Finally, this paper also includes an analysis of the soundness of the integrated procedure and the compatibility of models. Using the proposed methodology can significantly speed up the cycle time of capacity planning in semiconductor manufacturing. Because a large number of alternative portfolios can be generated and evaluated with multiple performance criteria, portfolio optimization is also greatly facilitated. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035669820&partnerID=40&md5=2e29a9c3f5c0a146832a3b1dc2a5f489 https://scholars.lib.ntu.edu.tw/handle/123456789/410953 |
ISSN: | 10724761 | SDG/關鍵字: | Computer simulation; Optimization; Planning; Queueing theory; Tools; WSI circuits; Capacity planning; Semiconductor device manufacture |
顯示於: | 土木工程學系 |
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