https://scholars.lib.ntu.edu.tw/handle/123456789/411558
DC Field | Value | Language |
---|---|---|
dc.contributor | 張培仁、李其源、吳政忠、陳永裕、鄭英周、鮑世勇、陳炳煇、顏凱翔 | - |
dc.contributor.author | 陳炳煇 | zh-TW |
dc.coverage.temporal | 2010/1/1~2027/1/22 | - |
dc.creator | 陳炳煇 | - |
dc.date.accessioned | 2019-06-26T07:37:05Z | - |
dc.date.available | 2019-06-26T07:37:05Z | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/411558 | - |
dc.language | zh-TW | - |
dc.title | 濕蝕刻矽薄膜之厚度即時監控方法 | zh_TW |
dc.type | Patent | en |
dc.identifier.patentno | 中華民國專利 205620 | - |
item.openairetype | Patent | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.orcid | 0000-0002-8073-9344 | - |
crisitem.author.parentorg | College of Engineering | - |
Appears in Collections: | 機械工程學系 |
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