https://scholars.lib.ntu.edu.tw/handle/123456789/443394
Title: | InGaAs MOSCAPs and self-aligned inversion-channel MOSFETs with Al <inf>2</inf>O<inf>3</inf>/Ga<inf>2</inf>O<inf>3</inf>(Gd<inf>2</inf>O <inf>3</inf>) as a gate dielectric | Authors: | Lin, T.D. Chiu, H.C. Chang, P. Lee, W.C. Chinag, T.H. Kwo, J. Tsai, W. MINGHWEI HONG |
Issue Date: | 2009 | Journal Volume: | 19 | Journal Issue: | 5 | Start page/Pages: | 351-360 | Source: | ECS Transactions | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/443394 | DOI: | 10.1149/1.3119558 |
Appears in Collections: | 物理學系 |
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