https://scholars.lib.ntu.edu.tw/handle/123456789/443420
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Pan, C.H. | en_US |
dc.contributor.author | Kwo, J. | en_US |
dc.contributor.author | Lee, K.Y. | en_US |
dc.contributor.author | Lee, W.C. | en_US |
dc.contributor.author | Chu, L.K. | en_US |
dc.contributor.author | Huang, M.L. | en_US |
dc.contributor.author | Lee, Y.J. | en_US |
dc.contributor.author | Hong, M. | en_US |
dc.contributor.author | MINGHWEI HONG | zz |
dc.creator | Pan, C.H.;Kwo, J.;Lee, K.Y.;Lee, W.C.;Chu, L.K.;Huang, M.L.;Lee, Y.J.;Hong, M. | - |
dc.date.accessioned | 2019-12-27T07:49:40Z | - |
dc.date.available | 2019-12-27T07:49:40Z | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/443420 | - |
dc.relation.ispartof | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | - |
dc.title | Si metal-oxide-semiconductor devices with high 庥 Hf O2 fabricated using a novel MBE template approach followed by atomic layer deposition | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1116/1.2912087 | - |
dc.identifier.scopus | 2-s2.0-44649169602 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-44649169602&doi=10.1116%2f1.2912087&partnerID=40&md5=401de13495dc858f80354fc00af1982c | - |
dc.relation.pages | 1178-1181 | - |
dc.relation.journalvolume | 26 | - |
dc.relation.journalissue | 3 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
crisitem.author.dept | Applied Physics | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Physics | - |
crisitem.author.orcid | 0000-0003-4657-0933 | - |
crisitem.author.parentorg | College of Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Science | - |
顯示於: | 物理學系 |
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