https://scholars.lib.ntu.edu.tw/handle/123456789/443431
Title: | Ga2 O3 (Gd2 O3) Si3 N4 dual-layer gate dielectric for InGaAs enhancement mode metal-oxide-semiconductor field-effect transistor with channel inversion | Authors: | Zheng, J.F. Tsai, W. Lin, T.D. Lee, Y.J. Chen, C.P. Hong, M. Kwo, J. Cui, S. Ma, T.P. MINGHWEI HONG |
Issue Date: | 2007 | Journal Volume: | 91 | Journal Issue: | 22 | Source: | Applied Physics Letters | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/443431 | DOI: | 10.1063/1.2817742 |
Appears in Collections: | 物理學系 |
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