https://scholars.lib.ntu.edu.tw/handle/123456789/443447| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chiou, Y.-K. | en_US |
| dc.contributor.author | Chang, C.-H. | en_US |
| dc.contributor.author | Wang, C.-C. | en_US |
| dc.contributor.author | Lee, K.-Y. | en_US |
| dc.contributor.author | Wu, T.-B. | en_US |
| dc.contributor.author | Kwo, R. | en_US |
| dc.contributor.author | Hong, M. | en_US |
| dc.contributor.author | MINGHWEI HONG | zz |
| dc.creator | Chiou, Y.-K.;Chang, C.-H.;Wang, C.-C.;Lee, K.-Y.;Wu, T.-B.;Kwo, R.;Hong, M. | - |
| dc.date.accessioned | 2019-12-27T07:49:46Z | - |
| dc.date.available | 2019-12-27T07:49:46Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/443447 | - |
| dc.relation.ispartof | Journal of the Electrochemical Society | - |
| dc.title | Effect of Al incorporation in the thermal stability of atomic-layer- deposited HfO<inf>2</inf> for gate dielectric applications | - |
| dc.type | journal article | - |
| dc.identifier.doi | 10.1149/1.2472562 | - |
| dc.identifier.scopus | 2-s2.0-33947173848 | - |
| dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33947173848&doi=10.1149%2f1.2472562&partnerID=40&md5=030ac9e7b06536b84dca253badcbb573 | - |
| dc.relation.pages | G99-G102 | - |
| dc.relation.journalvolume | 154 | - |
| dc.relation.journalissue | 4 | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.grantfulltext | none | - |
| item.openairetype | journal article | - |
| item.cerifentitytype | Publications | - |
| item.fulltext | no fulltext | - |
| crisitem.author.dept | Applied Physics | - |
| crisitem.author.dept | Center for Condensed Matter Sciences | - |
| crisitem.author.dept | Electronics Engineering | - |
| crisitem.author.dept | Physics | - |
| crisitem.author.orcid | 0000-0003-4657-0933 | - |
| crisitem.author.parentorg | College of Science | - |
| crisitem.author.parentorg | Research Center | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Science | - |
| Appears in Collections: | 物理學系 | |
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