Surface passivation of III-V compound semiconductors using atomic-layer-deposition-grown Al<inf>2</inf>O<inf>3</inf>

Surface passivation of III-V compound semiconductors using atomic-layer-deposition-grown Al2O3

Journal

Applied Physics Letters

Series/Report No.

252104

Journal Volume

25

Journal Volume

87

Journal Issue

25

Pages

1????87

Start Page

1

End Page

3

ISBN

10.1063/1.2146060

Date Issued

2005

Author(s)

Huang, M.L.

Chang, Y.C.

Chang, C.H.

Lee, Y.J.

Chang, P.

Kwo, J.

Wu, T.B.

URI

URL

Type

journal article