https://scholars.lib.ntu.edu.tw/handle/123456789/443463
Title: | MBE-grown high 庥 gate dielectrics of HfO <inf>2</inf> and (Hf-Al)O <inf>2</inf> for Si and III-V semiconductors nano-electronics | Authors: | Lee, W.C. Lee, Y.J. Wu, Y.D. Chang, P. Huang, Y.L. Hsu, Y.L. Mannaerts, J.P. Lo, R.L. Chen, F.R. Maikap, S. Lee, L.S. Hsieh, W.Y. Tsai, M.J. Lin, S.Y. Gustffson, T. Hong, M. Kwo, J. MINGHWEI HONG |
Issue Date: | 2005 | Journal Volume: | 278 | Start page/Pages: | 619-623 | Source: | Journal of Crystal Growth | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/443463 | ISBN: | 10.1016/j.jcrysgro.2004.12.127 |
Appears in Collections: | 物理學系 |
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