GaAs MOSFET with oxide gate dielectric grown by atomic layer deposition
Journal
IEEE Electron Device Letters
Journal Volume
24
Pages
209-211
ISBN
10.1109/LED.2003.812144
Date Issued
2003
Author(s)
Ye, P.D.
Wilk, G.D.
Kwo, J.
Yang, B.
Gossmann, H.-J.L.
Frei, M.
Chu, S.N.G.
Mannaerts, J.P.
Sergent, M.
Ng, K.K.
Bude, J.
Type
other