https://scholars.lib.ntu.edu.tw/handle/123456789/445433| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hsu, C. C. | en_US |
| dc.contributor.author | Titus, M. J. | en_US |
| dc.contributor.author | Graves, D. B. | en_US |
| dc.contributor.author | JERRY CHENG-CHE HSU | zz |
| dc.creator | JERRY CHENG-CHE HSU;Graves, D. B.;Titus, M. J.;Hsu, C. C. | - |
| dc.date.accessioned | 2020-01-06T03:08:41Z | - |
| dc.date.available | 2020-01-06T03:08:41Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.issn | 0734-2101 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/445433 | - |
| dc.relation.ispartof | Journal of Vacuum Science & Technology A | - |
| dc.title | Measurement and modeling of time- and spatial-resolved wafer surface temperature in inductively coupled plasmas | en_US |
| dc.type | journal article | - |
| dc.identifier.doi | 10.1116/1.2731369 | - |
| dc.identifier.isi | WOS:000246746100032 | - |
| dc.relation.pages | 607-614 | - |
| dc.relation.journalvolume | 25 | - |
| dc.relation.journalissue | 3 | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.cerifentitytype | Publications | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | Chemical Engineering | - |
| crisitem.author.orcid | 0000-0002-8366-3592 | - |
| crisitem.author.parentorg | College of Engineering | - |
| Appears in Collections: | 化學工程學系 | |
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