https://scholars.lib.ntu.edu.tw/handle/123456789/445762
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chattopadhyay, S. | en_US |
dc.contributor.author | Chen, L. C. | en_US |
dc.contributor.author | Chien, S. C. | en_US |
dc.contributor.author | Lin, S. T. | en_US |
dc.contributor.author | Chen, K. H. | en_US |
dc.contributor.author | SHIANG-TAI LIN | en_US |
dc.creator | SHIANG-TAI LIN;Chen, K. H.;Lin, S. T.;Chien, S. C.;Chen, L. C.;Chattopadhyay, S. | - |
dc.date.accessioned | 2020-01-06T03:11:07Z | - |
dc.date.available | 2020-01-06T03:11:07Z | - |
dc.date.issued | 2002 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/445762 | - |
dc.relation.ispartof | Journal of Applied Physics | - |
dc.title | Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1063/1.1512966 | - |
dc.identifier.isi | WOS:000178767200043 | - |
dc.relation.pages | 5150-5158 | - |
dc.relation.journalvolume | 92 | - |
dc.relation.journalissue | 9 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.orcid | 0000-0001-8513-8196 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 化學工程學系 |
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