https://scholars.lib.ntu.edu.tw/handle/123456789/445765
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lo, H. C. | en_US |
dc.contributor.author | Wu, J. J. | en_US |
dc.contributor.author | Wen, C. Y. | en_US |
dc.contributor.author | Wong, T. S. | en_US |
dc.contributor.author | Lin, S. T. | en_US |
dc.contributor.author | Chen, K. H. | en_US |
dc.contributor.author | SHIANG-TAI LIN | en_US |
dc.contributor.author | LI-CHYONG CHEN | en_US |
dc.creator | SHIANG-TAI LIN;Chen, L. C.;Chen, K. H.;Lin, S. T.;Wong, T. S.;Wen, C. Y.;Wu, J. J.;Lo, H. C. | - |
dc.date.accessioned | 2020-01-06T03:11:08Z | - |
dc.date.available | 2020-01-06T03:11:08Z | - |
dc.date.issued | 2001 | - |
dc.identifier.issn | 0925-9635 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/445765 | - |
dc.relation.ispartof | Diamond and Related Materials | - |
dc.title | Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/S0925-9635(01)00421-6 | - |
dc.identifier.isi | WOS:000170775900070 | - |
dc.relation.pages | 1916-1920 | - |
dc.relation.journalvolume | 10 | - |
dc.relation.journalissue | 9-10 | - |
item.openairetype | journal article | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.orcid | 0000-0001-8513-8196 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 化學工程學系 |
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