https://scholars.lib.ntu.edu.tw/handle/123456789/445988
Title: | Deposition of silicon carbon nitride films by ion beam sputtering | Authors: | Wu, J. J. Wu, C. T. Liao, Y. C. Lu, T. R. Chen, L. C. Chen, K. H. Hwa, L. G. Kuo, C. T. YING-CHIH LIAO LI-CHYONG CHEN |
Issue Date: | 1999 | Journal Volume: | 355 | Start page/Pages: | 417-422 | Source: | Thin Solid Films | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/445988 | ISSN: | 0040-6090 | DOI: | 10.1016/S0040-6090(99)00458-7 |
Appears in Collections: | 化學工程學系 |
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