https://scholars.lib.ntu.edu.tw/handle/123456789/445988
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Wu, J. J. | en_US |
dc.contributor.author | Wu, C. T. | en_US |
dc.contributor.author | Liao, Y. C. | en_US |
dc.contributor.author | Lu, T. R. | en_US |
dc.contributor.author | Chen, L. C. | en_US |
dc.contributor.author | Chen, K. H. | en_US |
dc.contributor.author | Hwa, L. G. | en_US |
dc.contributor.author | Kuo, C. T. | en_US |
dc.contributor.author | YING-CHIH LIAO | en_US |
dc.contributor.author | LI-CHYONG CHEN | en_US |
dc.creator | YING-CHIH LIAO;Ling, K. J.;Kuo, C. T.;Hwa, L. G.;Chen, K. H.;Chen, L. C.;Lu, T. R.;Liao, Y. C.;Wu, C. T.;Wu, J. J. | - |
dc.date.accessioned | 2020-01-06T03:12:01Z | - |
dc.date.available | 2020-01-06T03:12:01Z | - |
dc.date.issued | 1999 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/445988 | - |
dc.relation.ispartof | Thin Solid Films | - |
dc.title | Deposition of silicon carbon nitride films by ion beam sputtering | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/S0040-6090(99)00458-7 | - |
dc.identifier.isi | WOS:000084500800073 | - |
dc.relation.pages | 417-422 | - |
dc.relation.journalvolume | 355 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.orcid | 0000-0001-9496-4190 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 化學工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。