https://scholars.lib.ntu.edu.tw/handle/123456789/447517
Title: | Compact MEMS/NEMS characterization platform using a DVD optical pick-up unit with optical imaging function | Authors: | Chen, C.-H. Larsen, P.E. Schmid, S. Liao, H.-S. Huang, K.-Y. Hwang, I.-S. Boisen, A. Hwu, E.-T. HSIEN-SHUN LIAO |
Issue Date: | 2013 | Journal Volume: | 2 | Start page/Pages: | 485-488 | Source: | 2013 NSTI Nanotechnology Conference and Expo | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447517 |
Appears in Collections: | 機械工程學系 |
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