Compact MEMS/NEMS characterization platform using a DVD optical pick-up unit with optical imaging function
Journal
2013 NSTI Nanotechnology Conference and Expo
Journal Volume
2
Pages
485-488
Date Issued
2013
Author(s)
Chen, C.-H.
Larsen, P.E.
Schmid, S.
Liao, H.-S.
Huang, K.-Y.
Hwang, I.-S.
Boisen, A.
Hwu, E.-T.
Type
conference paper