https://scholars.lib.ntu.edu.tw/handle/123456789/447757
Title: | Simultaneous detection of translational and angular displacements of micromachined elements | Authors: | Hwu, E.-T. Hung, S.-K. Yang, C.-W. Hwang, I.-S. Huang, K.-Y. KUANG-YUH HUANG |
Issue Date: | 2007 | Journal Volume: | 91 | Journal Issue: | 22 | Source: | Applied Physics Letters | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447757 | DOI: | 10.1063/1.2817750 |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.