https://scholars.lib.ntu.edu.tw/handle/123456789/447795
Title: | Effect of main gas and carrier gas on ZnO thin films deposited by atmospheric pressure plasma jet | Authors: | Chou, T.-S. Lin, H.-T. Chen, Y.-Y. Pan, K.-L. JIA-YANG JUANG KUO-LONG PAN |
Issue Date: | 2015 | Journal Volume: | 594 | Start page/Pages: | 282-286 | Source: | Thin Solid Films | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447795 | DOI: | 10.1016/j.tsf.2015.05.050 |
Appears in Collections: | 機械工程學系 |
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