Optimized surface structure by laser treatment for the relaxation of residual stress in bent GaN film

Journal

Journal of Physics D: Applied Physics

Journal Volume

46

Journal Issue

6

Date Issued

2013

Author(s)

Chen, C.-H.

Liao, M.-H.

Chang, L.-C.

Kao, S.-C.

Yang, C.

Yu, M.-Y.

Liu, G.-H.

DOI

10.1088/0022-3727/46/6/065104

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447968

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84873859027&doi=10.1088%2f0022-3727%2f46%2f6%2f065104&partnerID=40&md5=e1ddd4b85bcba0e0e548f37a87ed4843

Type

journal article