https://scholars.lib.ntu.edu.tw/handle/123456789/448259
Title: | Vibration measurement and suppression for laser galvanometers using a micro-electromechanical system-based accelerometer | Authors: | Chou, P.-H. Hsu, Y.-L. Yang, S.-C. Chang, H.-C. Kuo, Y.-C. Chiu, L.-F. Chen, Y.-T. SHIH-CHIN YANG |
Issue Date: | 2018 | Journal Volume: | 30 | Journal Issue: | 11 | Start page/Pages: | 2401-2418 | Source: | Sensors and Materials | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448259 | DOI: | 10.18494/SAM.2018.1976 |
Appears in Collections: | 機械工程學系 |
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