https://scholars.lib.ntu.edu.tw/handle/123456789/448465
Title: | Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Process With Membrane Filters | Authors: | Ma, C.-W. Chang, C.-M. Lin, T.-H. Yang, Y.-J.J. YAO-JOE YANG |
Issue Date: | 2015 | Journal Volume: | 24 | Journal Issue: | 6 | Start page/Pages: | 2062-2070 | Source: | Journal of Microelectromechanical Systems | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448465 | DOI: | 10.1109/JMEMS.2015.2469252 |
Appears in Collections: | 機械工程學系 |
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