https://scholars.lib.ntu.edu.tw/handle/123456789/451458
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen, C.-Y. | en_US |
dc.contributor.author | Ng, P.C.W. | en_US |
dc.contributor.author | Liu, C.-H. | en_US |
dc.contributor.author | Shen, Y.-T. | en_US |
dc.contributor.author | Tsai, K.-Y. | en_US |
dc.contributor.author | Li, J.-H. | en_US |
dc.contributor.author | Shieh, J.J. | en_US |
dc.contributor.author | KUEN-YU TSAI | en_US |
dc.contributor.author | JIA-HAN LI | en_US |
dc.creator | JIA-HAN LI;Chen, A.C.;Shieh, J.J.;Li, J.-H.;Tsai, K.-Y.;Shen, Y.-T.;Liu, C.-H.;Ng, P.C.W.;Chen, C.-Y. | - |
dc.date.accessioned | 2020-01-17T07:45:13Z | - |
dc.date.available | 2020-01-17T07:45:13Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/451458 | - |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.title | Direct-scatterometry-enabled optical-proximity-correction-model calibration | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.2009064 | - |
dc.identifier.scopus | 2-s2.0-84878593681 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878593681&doi=10.1117%2f12.2009064&partnerID=40&md5=e93288b1362ef6177c4f05bccb163f31 | - |
dc.relation.journalvolume | 8681 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Engineering Science and Ocean Engineering | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Engineering | - |
Appears in Collections: | 工程科學及海洋工程學系 |
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