https://scholars.lib.ntu.edu.tw/handle/123456789/451467
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, C.-Y. | en_US |
dc.contributor.author | Tsai, K.-Y. | en_US |
dc.contributor.author | Shen, Y.-T. | en_US |
dc.contributor.author | Lee, Y.-M. | en_US |
dc.contributor.author | Li, J.-H. | en_US |
dc.contributor.author | Shieh, J.J. | en_US |
dc.contributor.author | KUEN-YU TSAI | en_US |
dc.contributor.author | JIA-HAN LI | en_US |
dc.creator | JIA-HAN LI;Chen, A.C.;Shieh, J.J.;Li, J.-H.;Lee, Y.-M.;Shen, Y.-T.;Tsai, K.-Y.;Chen, C.-Y. | - |
dc.date.accessioned | 2020-01-17T07:45:15Z | - |
dc.date.available | 2020-01-17T07:45:15Z | - |
dc.date.issued | 2012 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/451467 | - |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.title | Direct-scatterometry-enabled lithography model calibration | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.917516 | - |
dc.identifier.scopus | 2-s2.0-84861060205 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861060205&doi=10.1117%2f12.917516&partnerID=40&md5=dad3bb1298a80a2e4d804b3480fabe09 | - |
dc.relation.journalvolume | 8324 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Engineering Science and Ocean Engineering | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工程科學及海洋工程學系 |
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