https://scholars.lib.ntu.edu.tw/handle/123456789/451977
標題: | A low-power integrated humidity CMOS sensor by printing-on-chip technology | 作者: | Lee, C.-H. Chuang, W.-Y. Cowan, M.A. CHIH-TING LIN WEN-JONG WU |
關鍵字: | Gas sensor; Inkjet printing; Sensor integration | 公開日期: | 2014 | 卷: | 14 | 期: | 5 | 起(迄)頁: | 9247-9255 | 來源出版物: | Sensors (Switzerland) | 摘要: | A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene)/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 μm CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity sensing of the implemented printing-on-chip sensor system is experimentally tested. The sensor shows a sensitivity of 0.98% to humidity in the atmosphere. The maximum dynamic range of the readout circuit is 9.8 MΩ, which can be further tuned by the frequency of input signal to fit the requirement of the resistance of printed sensor. The power consumption keeps only 154 μW. This printing-on-chip sensor provides a practical solution to fulfill an ultra-small integrated sensor for the applications in miniaturized sensing systems. © 2014 by the authors; licensee MDPI, Basel, Switzerland. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451977 | ISSN: | 14248220 | DOI: | 10.3390/s140509247 | SDG/關鍵字: | Chemical sensors; CMOS integrated circuits; Ethylene; Humidity sensors; Ink jet printing; Interfaces (materials); System-on-chip; Humidity sensing; Integrated sensors; Interface circuits; Practical solutions; Read-out circuit; Sensor integration; System-on-chip architecture; Three dimensional sensors; Low power electronics |
顯示於: | 工程科學及海洋工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。