https://scholars.lib.ntu.edu.tw/handle/123456789/452055
Title: | Design and performance verification of a microscope-based interferometer for miniature-specimen metrology | Authors: | Lee, C.-K. Wu, W.-J. Wu, G.-Y. Li, C.-L. Chen, Z.-D. WEN-JONG WU CHIH-KUNG LEE |
Issue Date: | 2005 | Journal Volume: | 44 | Journal Issue: | 8 | Source: | Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/452055 | DOI: | 10.1117/1.2010147 |
Appears in Collections: | 工程科學及海洋工程學系 |
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