https://scholars.lib.ntu.edu.tw/handle/123456789/467228
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Rostami, H. | en_US |
dc.contributor.author | Blue, J. | en_US |
dc.contributor.author | Chen, A. | en_US |
dc.contributor.author | ARGON CHEN | en_US |
dc.contributor.author | JAKEY BLUE | en_US |
dc.creator | ARGON CHEN;Yugma, C.;Chen, A.;Blue, J.;Rostami, H. | - |
dc.date.accessioned | 2020-03-02T06:39:52Z | - |
dc.date.available | 2020-03-02T06:39:52Z | - |
dc.date.issued | 2018 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/467228 | - |
dc.relation.ispartof | IEEE International Conference on Automation Science and Engineering | - |
dc.title | Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1109/COASE.2018.8560435 | - |
dc.identifier.scopus | 2-s2.0-85059985370 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85059985370&doi=10.1109%2fCOASE.2018.8560435&partnerID=40&md5=d6dcbf800f4b54da8ba93077edcea273 | - |
dc.relation.pages | 1316-1321 | - |
dc.relation.journalvolume | 2018-August | - |
item.fulltext | no fulltext | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.orcid | 0000-0001-7771-4368 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工業工程學研究所 |
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