https://scholars.lib.ntu.edu.tw/handle/123456789/467256
Title: | Age-based double EWMA controller and its application to a CMP process | Authors: | Chen, A. Guo, R.-S. ARGON CHEN |
Issue Date: | 2000 | Start page/Pages: | 261-276 | Source: | Run-to-Run Control in Semiconductor Manufacturing | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/467256 |
Appears in Collections: | 工業工程學研究所 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.