https://scholars.lib.ntu.edu.tw/handle/123456789/481888
Title: | 離子濺鍍法成長矽碳氮薄膜及其機械性質研究=Ion Beam Sputtered Growth and Mechanical Properties of SiCN Films | Authors: | 王春 馬廣仁 陳貴賢 柯琪 林麗瓊 |
Issue Date: | 2001 | Publisher: | 材料科技聯合會 | Journal Volume: | 33 | Journal Issue: | 1 | Start page/Pages: | 38-43 | Source: | 材料科學與工程 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/481888 | DOI: | 10.6409/JMSE.200103.0038 |
Appears in Collections: | 凝態科學研究中心 |
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