https://scholars.lib.ntu.edu.tw/handle/123456789/486844| Title: | Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers | Authors: | Wu, T.-T. Chen, Y.-Y. Huang, G.-T. Chang, P.-Z. PEI-ZEN CHANG |
Issue Date: | 2005 | Journal Volume: | 97 | Journal Issue: | 7 | Source: | Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486844 | DOI: | 10.1063/1.1865319 |
| Appears in Collections: | 應用力學研究所 |
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