https://scholars.lib.ntu.edu.tw/handle/123456789/486858
Title: | Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process | Authors: | Chang, S.-C. Dai, C.-L. Chiou, J.-H. PEI-ZEN CHANG |
Issue Date: | 2001 | Journal Volume: | 4334 | Start page/Pages: | 336-344 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486858 | DOI: | 10.1117/12.436619 |
Appears in Collections: | 應用力學研究所 |
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