https://scholars.lib.ntu.edu.tw/handle/123456789/486871
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Dai, C.-L. | en_US |
dc.contributor.author | PEI-ZEN CHANG | en_US |
dc.creator | PEI-ZEN CHANG;Chang, P.-Z.;Dai, C.-L. | - |
dc.date.accessioned | 2020-04-28T07:15:25Z | - |
dc.date.available | 2020-04-28T07:15:25Z | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/486871 | - |
dc.relation.ispartof | Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | - |
dc.title | In-situ micro strain gauges for measuring residual strain of three cmos thin films using only one maskless post-processing step | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1080/02533839.1997.9741860 | - |
dc.identifier.scopus | 2-s2.0-0031220929 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0031220929&doi=10.1080%2f02533839.1997.9741860&partnerID=40&md5=a01d17324b28a5b61107e599781d55ec | - |
dc.relation.pages | 539-548 | - |
dc.relation.journalvolume | 20 | - |
dc.relation.journalissue | 5 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 應用力學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。