https://scholars.lib.ntu.edu.tw/handle/123456789/497827
Title: | Sacrificial structure for effective sapphire substrate liftoff based on photoelectrochemical etching | Authors: | Hsieh, C. Su, C.-Y. Weng, C.-M. Chi, T.-T. Kiang, Y.-W. CHIH-CHUNG YANG YEAN-WOEI KIANG |
Issue Date: | 2015 | Journal Volume: | 27 | Journal Issue: | 7 | Start page/Pages: | 770-773 | Source: | IEEE Photonics Technology Letters | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/497827 | DOI: | 10.1109/LPT.2015.2392108 |
Appears in Collections: | 電機工程學系 |
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