Radiation hardness of fluorinated oxides prepared by Liquid phase deposition method following rapid thermal oxidation

Journal

1994 International Electron Devices and Materials Symposium, EDMS 1994

Date Issued

1994

Author(s)

Lu, W.-S.

Chou, J.-S.

Lee, S.-C.

DOI

10.1109/EDMS.1994.771109

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498828

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85005847676&doi=10.1109%2fEDMS.1994.771109&partnerID=40&md5=2437c687310869add7bcf784f5844f56

Type

conference paper