https://scholars.lib.ntu.edu.tw/handle/123456789/503901
Title: | Thermal Diffusivity in Amorphous Silicon Carbon Nitride Thin Films by the Traveling Wave Technique | Authors: | S. Chattopadhyay L. C. Chen C. T. Wu K. H. Chen J. S. Wu Y. F. Chen G. Lehmann P. Hess |
Issue Date: | 2001 | Publisher: | American Institute of Physics | Journal Volume: | 79 | Journal Issue: | 3 | Start page/Pages: | 332-334 | Source: | Applied Physics Letters | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/503901 | ISSN: | 00036951 | DOI: | https://doi.org/10.1063/1.1386619 |
Appears in Collections: | 凝態科學研究中心 |
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