https://scholars.lib.ntu.edu.tw/handle/123456789/503913
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | J.-J. Wu | en_US |
dc.contributor.author | K. H. Chen | en_US |
dc.contributor.author | C. Y. Wen | en_US |
dc.contributor.author | L. C. Chen | en_US |
dc.contributor.author | Y. C. Yu | en_US |
dc.contributor.author | C. W. Wang | en_US |
dc.contributor.author | E. K. Lin | en_US |
dc.creator | E. K. Lin;C. W. Wang;Y. C. Yu;L. C. Chen;C. Y. Wen;K. H. Chen;J.-J. Wu | - |
dc.date.accessioned | 2020-06-20T05:40:25Z | - |
dc.date.available | 2020-06-20T05:40:25Z | - |
dc.date.issued | 2001 | - |
dc.identifier.issn | 02540584 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/503913 | - |
dc.publisher | Elsevier B.V. | - |
dc.relation.ispartof | Materials Chemistry and Physics | - |
dc.title | Effect of Dilution Gas on SiCN Films Growth Using Methylamine | en_US |
dc.type | journal article | en |
dc.identifier.doi | https://doi.org/10.1016/S0254-0584(01)00445-X | - |
dc.relation.pages | 240-244 | - |
dc.relation.journalvolume | 72 | - |
dc.relation.journalissue | 2 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 凝態科學研究中心 |
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