https://scholars.lib.ntu.edu.tw/handle/123456789/503925
Title: | Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films | Authors: | S. Chattopadhyay L. C. Chen S. C. Chien S. T. Lin K. H. Chen |
Issue Date: | 2002 | Publisher: | American Institute of Physics Inc. | Journal Volume: | 92 | Journal Issue: | 9 | Start page/Pages: | 5150?-5158 | Source: | Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/503925 | ISSN: | 00218979 | DOI: | https://doi.org/10.1063/1.1512966 |
Appears in Collections: | 凝態科學研究中心 |
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